Chemistry of Atomic Layer Deposition (de Gruyter Textbook) (Paperback)

Chemistry of Atomic Layer Deposition (de Gruyter Textbook) By Seán Thomas Barry Cover Image
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Description


This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.

Product Details
ISBN: 9783110712513
ISBN-10: 3110712512
Publisher: de Gruyter
Publication Date: November 22nd, 2021
Pages: 113
Language: English
Series: de Gruyter Textbook