Handbook of Silicon Based Mems Materials and Technologies (Micro and Nano Technologies) (Hardcover)

Handbook of Silicon Based Mems Materials and Technologies (Micro and Nano Technologies) By Markku Tilli (Editor), Mervi Paulasto-Kröckel (Editor), Teruaki Motooka (Editor) Cover Image
By Markku Tilli (Editor), Mervi Paulasto-Kröckel (Editor), Teruaki Motooka (Editor)
$275.00

Description


The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS.

The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components.

Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs.

Product Details
ISBN: 9780323299657
ISBN-10: 0323299652
Publisher: William Andrew
Publication Date: September 22nd, 2015
Pages: 826
Language: English
Series: Micro and Nano Technologies